E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Revision:SEMI E30.5-0302 (Reapproved 0308) - Superseded SEMI C69-1015 (Reapproved 1220)

SEMI C69-1015 (Reapproved 1220)

この文書の適用範囲は，測定方法と下記に示す物体表面の帯電の最大推奨レベルに関するガイドに限定される。

Data Types

The experimental data were provided by volunteer participants in this study and have not been independently verified

NOTICE: This Document is no longer supported by the global technical committee

E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Revision:SEMI E30.5-0302 (Reapproved 0308) - Superseded SEMI C69-1015 (Reapproved 1220)This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications