E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles Revision:SEMI E100-0302E-EN - Superseded optical image-shearing with optical or

optical image-shearing with optical or video display

The response is determined for the RF generator operating into a nominal

as a part of equipment’s control system

SEMI E87-1000 (technical revision)

SEMI MF723 — Practice for Conversion Between Resistivity and Dopant or Carrier Density for Boron-Doped

E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles Revision:SEMI E100-0302E-EN - Superseded optical image-shearing with optical orNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the Reticle SMIF Pod (RSP) used to transport and store 6 inch or 230 mm reticles in a reticle (photomask) or integrated circuit (IC) manufacturing facility. This Standard is intended to set an