P02200 - SEMI P22 - Guideline for Photomask Defect Classification and Size Definition Revision:'- Superseded The model consists of equipment

The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities

mean time to (perform) preventive maintenance (MTTPM)

1-1015 — Specification for Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume

4-0998E (Reapproved 0709)

SEMI M8-1296 (technical revision)

P02200 - SEMI P22 - Guideline for Photomask Defect Classification and Size Definition Revision:'- Superseded The model consists of equipmentNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this guideline is to establish standard nomenclature for photomask defect classifications, and to define defect sizing methods. Within this Document only the word photomask will be used, but it is meant to be