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本仕様は，自動ポッド操作を可能にするポッドハンドルのための一体構造および配置を規定するものである。
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The purpose of this Specification is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards
The characteristic shape and magnitude of oxygen concentration distributions in crystals are functions of the crystal growth process
F00400 - SEMI F4 - Specification for Pneumatically Actuated Cylinder Valves StdPbc-0323 like pasteNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification establishes the minimum design and performance requirements for pneumatically actuated cylinder valves used in semiconductor manufacturing. It is also intended as an aid in the procurement of these
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