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Connectivity
The Yield Management System is a kind of data server for detail test data and geometrical defect data of patterns on a wafer as described in the Terminology section of this Document
SEMI E45 — Test Method for the Determination of Inorganic Contamination from Minienvironments Using Vapor Phase Decomposition-Total Reflection X-Ray Spectroscopy (VPD-TXRF)
SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
Existing specifications for the EUV substrate
E19000 - SEMI E190 - Specification for Equipment Data Publication (EDP) Revision:SEMI E190-1124 - Current ConnectivityNOTICE: By purchasing this download, you will receive the Primary Standard and the Subordinate Standard. 1 Purpose 1. 1 The purpose of this Specification is to provide a framework to equipment suppliers on how equipment data is categorized for specific component types and the minimum set of data required for that component type. 2 Scope 2. 1 This Specification defines equipment data concepts, shareable and nonshareable data concepts and category
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