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In the case of the guide
SEMI D6 — Standard Size and Thickness for Flat Panel Display Mask Substrates
SEMI C92-0216 (first published)
本スタンダードは，global Flat Panel Display – Materials & Components Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年4月にwww
23 — Standard for Oxygen (O2)
C08600 - SEMI C86 - Guide for Ethylene Glycol StdTpc-3DS-IC In the case of theThe purpose of this Document is to provide a Guide for ethylene glycol for which a need has been identified. The scope of this Document covers grades of ethylene glycol which are used in the semiconductor industry. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemical
