E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Revision:SEMI E154-0713 - Superseded •Sensitivity

•Sensitivity

9に準拠した）オープンカセットを扱う。本スタンダードはそれらの種類ならびにキャリア容量（13枚と25枚の）をひとつのインタフェース規格によって規定する。

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E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Revision:SEMI E154-0713 - Superseded •SensitivityThe purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 450 FOUP and 450 MAC can be loaded and unloaded. The intention of this Document is to define a set of requirements and features to enable interoperability of load ports and carriers without limiting innovative solutions. The interface specification in this Document is driven by and intended to mate with a