D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0305 - Superseded 1 — Standard for Sensor/Actuator

1 — Standard for Sensor/Actuator Network Common Device Model

it makes sense to use the same wafer support configuration when measuring TTV

1  This Standard provides a series of specifications for different grades of oxygen (O2) that are used in the semiconductor industry

a subsystem

SEMI G32 — Guideline for Unencapsulated Thermal Test Chip

D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0305 - Superseded 1 — Standard for Sensor/ActuatorThis Specification defines the standard for substrates used to fabricate flat panel display masks. This Specification applies to photomasks that are principally used in fabricating flat panel displays. The edge lengths specified range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI P1