E00109 - SEMI E1.9 - 300 mmウェーハ搬送および保管用ウェーハカセットの機械仕様 Revision:SEMI E1.9-1106E (Reapproved 0512) - Inactive and calculating methods of perceptual

and calculating methods of perceptual angle

through to point of use (POU)

SEMI C93-0522 (technical revision)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee

filter housings

E00109 - SEMI E1.9 - 300 mmウェーハ搬送および保管用ウェーハカセットの機械仕様 Revision:SEMI E1.9-1106E (Reapproved 0512) - Inactive and calculating methods of perceptualglobal Physical Interfaces & Carriers Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org199420067 : IC300 mm "" 1 2 4 ID 1 2422 10 mm1325 1 ID 1 2 1 2 5 4 1 2 2 2 10 mm 3 15 mm 3 ID 1 Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E57 Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer