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G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン Revision:Default Title NOTE 2: The design and

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Description

NOTE 2: The design and configuration of a typical UPW system and descriptions of UPW system elements and unit processes can be found in SEMI F61

SEMI MF951-0305 (Reapproved 0316)

which covers the measurement

custom items to large areas

Methods of measurements suitable for determining the characteristics in this Specification are indicated

G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン Revision:Default Title NOTE 2: The design andglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1994 : 1 ! VLSI 3. 2 Referenced SEMI Standards None.

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