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Safety Philosophy (§ 6)
This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in
The scope of this Standard lists the proposed impurity limits of trans 1
本文書の目的は，トランス1，2ジクロロエチレンに対して要求が認められたグレードのガイドラインを示す。
SEMI E126-0708 (Reapproved 0518)
M05700 - SEMI M57 - シリコンアニールウェーハの仕様 Revision:SEMI M57-1011 - Superseded Safety Philosophy (§ 6)global Silicon Wafer Committee201323global Audits and Reviews Subcommittee20134www. semiviews. org www. semi. org20047201110 180 nm130 nm90 nm( R1 1), 65 nm, 45 nm, 32 nm, ( R1 2), 22 nm ( R1 3) crystal originated particlesCOPdenuded zoneDZ Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M35 Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection SEMI M45
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