F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdPbc-1021 orgで。前版は2003年11月発行。

orgで。前版は2003年11月発行。

as well as information and advice on performing a useful general electrostatic survey

SEMI M53-0306 (technical revision)

このスタンダードは，概念と動作からメッセージサービスに至るまでの解決法を提供する。しかしメッセージプロトコルは定義しない。

This Standard specifies the protocol and services that compliant intelligent devices must support to interchange information over this semiconductor equipment SAN

F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdPbc-1021 orgで。前版は2003年11月発行。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the internal pressure required to produce failure of fitting connections made of fluorocarbon materials. This method can be used to characterize tube fitting connections