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Additional manufacturer specific attributes
SEMI E84-0200A (technical revision)
• Dual-In-Line Packages (DIP)
SOIウェーハ（SEMI M41，SEMI M71あるいは，JEITA EM-3603B参照）
and implementation of a continuous improvement process are included since no electric utility industry standards exist
PV10200 - SEMI PV102 - Guide for Tube PECVD Graphite Boat Materials for Solar Cell Production Revision:SEMI PV102-0125 - Current Additional manufacturer specific attributes1 Purpose 1. 1 This Standard develops material guidelines for tube plasma enhanced chemical vapor deposition (PECVD) graphite boats, providing guidance and material performance testing for material manufacturers, processing manufacturers, and battery cell manufacturers. The high reliability of graphite boats is the goal to meet the needs of tubular PECVD process. 2 Scope 2. 1 This Standard provides recommendations for various property values and
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