S00600 - SEMI S6 - 半導體製造設備排氣通風基準 Revision:SEMI S6-0618 - Current SEMI D34-0823 (technical revision)

SEMI D34-0823 (technical revision)

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17

and resultant particle size and count are addressed in this Guide

and calculation for the effective control range of wire tension

development and early design investigation of 450 mm semiconductor equipment such as 450 mm wafers

S00600 - SEMI S6 - 半導體製造設備排氣通風基準 Revision:SEMI S6-0618 - Current SEMI D34-0823 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. Semiconductor Manufacturing EquipmentSME REF _Ref515551479 \h \r \t \* MERGEFORMAT 8 08D0C9EA79F9BACE118C8200AA004BA90B02000000080000000E0000005F005200650066003500310035003500350031003400370039000000 Referenced SEMI StandardsSEMI F5 Guide for