MF039700 - SEMI MF397 - Test Method for Resistivity of Silicon Bars Using a Two-Point Probe StdTpc-Process Chemicals - Miscellaneous the use of chromic acid

the use of chromic acid containing etchants is prohibited in some jurisdictions located in various parts of the world

This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5

This Standard mainly focuses on product wafer

1 —Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers

• Storage of the master copies of the recipes are centralized to Recipe Server in RMS (Recipe Server Centric concept)

MF039700 - SEMI MF397 - Test Method for Resistivity of Silicon Bars Using a Two-Point Probe StdTpc-Process Chemicals - Miscellaneous the use of chromic acidThis Test Method covers the measurement of the resistivity of single crystal bars having cross sections that are uniform in area and square, rectangular or round in shape, and having resistivity between 0. 0009 cm and 3000 cm. This Test Method is intended for use on single crystals of silicon of either n or p type for which the uniformity of the crystal cross section is such that the area can be accurately calculated. The specimen cross sectional area