F09600 - SEMI F96 - 液体CVD原料を入れるキャニスターのポート設定のための仕様 StdPbc-0622 the applicability of this specification

the applicability of this specification is not restricted or limited to this region alone

and small outline package (SOP) leadframe strips

SEMI S2-0302 (technical revision)

ナット，グリッパ等のような部品は，フロロカーボン材質で作成されなくてもよい。

1  This Specification covers characteristics of both the substrate (through reference to SEMI M1) and the epitaxial layer

F09600 - SEMI F96 - 液体CVD原料を入れるキャニスターのポート設定のための仕様 StdPbc-0622 the applicability of this specificationNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Gases CommitteeNorth American Gases Committee2004422North American Regional Standards Committee20046www. semi. org20047 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current