PV02900 - SEMI PV29 - Specification for Front Surface Marking of PV Silicon Wafers with Two-Dimensional Matrix Symbols StdPbc-0523 angle-resolved light scatterometers (ARLS)

angle-resolved light scatterometers (ARLS)

SEMI D20-93 (first published)

SEMI E94-1108 (technical revision)

Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation

マーキングシンボルは，新品基板からフルにパターン化済みの基板まで，

PV02900 - SEMI PV29 - Specification for Front Surface Marking of PV Silicon Wafers with Two-Dimensional Matrix Symbols StdPbc-0523 angle-resolved light scatterometers (ARLS)This Standard was technically approved by the Photovoltaic Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in October 2018; originally published February 2012. This Specification defines the position and size of the two dimensional matrix symbols excludes the occluding possibility of gridlines to