F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers It may be used as

It may be used as a basis for establishing performance criteria for purchases of new high purity water (HPW) equipment

本スタンダードは，Global Micropatterning Committeeで技術的に承認されたもので，North American Microlithography Committeeが直接責任を負うものである。現版は2004年8月16日North American Regional Standards Committeeにて承認されている。2004年9月にまずwww

この仕様は，モールディングコンパウンド中の抽出可能微量異物の定量のための試験方法を定義する。

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E本スタンダードは2006年5月に編集上の修正がなされた。修正箇所は，¶10

F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers It may be used as1 Purpose 1. 1 This Guide suggests formats for the facilities data package (FDP) typically required for the installation of manufacturing equipment in a facility. The data and formats suggested by this Guide complement other SEMI Standards (e. g., SEMI E6), and include the utility requirements and connections information needed for installing manufacturing equipment (including support equipment) and connecting that equipment to the facility and