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SEMI E142-0706 (technical revision)
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originally published January 2013
tetrakis(dimethylamino) zirconium
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C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdDcs-Withdrawn - Historical SEMI E142-0706 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to provide a guide for a grade of phosphorus oxychloride for which a need has been identified. 2 Scope 2. 1 This Standard lists the proposed impurity limits of phosphorus
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