M00100 - SEMI M1 - 鏡面単結晶シリコンウェーハの仕様 Revision:SEMI M1-1111 - Superseded 1 In-Scope

1  In-Scope

when this Test Method is used for materials specification or acceptance

and services to support the integration of production equipment within a semiconductor factory

PV module manufactures and buyers

SEMI G5-85 (technical revision)

M00100 - SEMI M1 - 鏡面単結晶シリコンウェーハの仕様 Revision:SEMI M1-1111 - Superseded 1 In-ScopeSEMI SEMI SOI TTV 1 322216 nm300450 mm1 Polycrystalline siliconSEMI M16 JEITA EM 3601A, SEMI M62, SEMI M61, SEMI M8, SEMI M24, SEMI M38, SEMI M57, SOISEMI M41SEMI M71JEITA EM 3603B, SEMI PV22 SOI 23SI100 mm 1. 10. 11. 10. 21. 111. 121. 13. 1 1. 13. 2JEITA EM 36021. 15JEITA EM 3602 1. 1 2 1. 2 3 1. 5 100mm525m m 1. 6 100mm625m m 1. 7 125mm 1. 8. 1 150mmT 3 1. 8. 2 150mmT 4 1. 9. 1 200mmT 3 1. 9. 2 200mmT 4 1. 9. 3 200mm 1. 10. 1 200mmT 3 1. 10. 2