E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) StdPbc-0813 Capacity tests are done by

Capacity tests are done by adding ppm levels of a given gaseous impurity to a pure zero gas and monitoring the effluent of the test purifier for active impurity species

The structured approach defined in this Guide can achieve high levels of power quality without sacrificing power reliability

Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation

and process equipment applications

SEMI C91-1115 (replaced by SEMI F118)

E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) StdPbc-0813 Capacity tests are done byThe purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC). This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects. This Standard describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero. The intent of this Standard is not to