ME139200 - SEMI ME1392 - Guide for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces Revision:SEMI ME1392-96 (Reapproved 2002) - Superseded This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19

and Total Thickness Variation on Silicon Wafers by Automated Non-Contact Scanning

this document defines strategies to support the device manufacturer’s ability to pre-facilitate the utility point of connection (UPOC)

SEMI E37-0819 (technical revision)

5  The more suitable measurement process consists of an alternative mounting for wafers with high aspect ratios and the use of high resolution measurements

ME139200 - SEMI ME1392 - Guide for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces Revision:SEMI ME1392-96 (Reapproved 2002) - Superseded This edition was approved forThis Guide explains a procedure for the determination of the amount and angular distribution of optical scatter from an opaque surface. In particular it focuses on measurement of the BRDF, which is a convenient and well accepted means of expressing optical scatter levels for many purposes. Additional data presentation formats described in Related Information 1 have advantages for certain applications. Surface parameters can be calculated from optical