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AMHS (including equipment
b and hue a*
the position of the substrate
and so forth) are dealt with by other SEMI Standards
SEMI D32 — Specification for Improved Information Management for Glass FPD Substrates through Orientation Corner Unification
C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices Revision:SEMI C16-0299 (Withdrawn 1110) - Withdrawn AMHS (including equipmentThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www. semi. org in October 2010. Originally published in 1997; previously published March 2005. NOTICE: This document was balloted and approved for withdrawal in 2010. To provide a minimal set of guidelines for precision and data reporting
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