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E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded The purpose of defining a

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Description

The purpose of defining a comprehensive training system is to provide the basis for a common understanding of the required elements to effectively deliver training

and hence decomposition

SEMI E94-1108 (technical revision)

The information and conclusions provided are taken from published literature

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E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded The purpose of defining a1 Purpose 1. 1 The purpose is to provide guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below. 2 Scope 2. 1 The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s), and electrostatic discharge (ESD) on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment,

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