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E05700 - SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様 Revision:SEMI E57-0600E2 (Reapproved 0305) - Superseded この文書の目的は:(1) 20/0

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Description

この文書の目的は:(1) 20/0

1  The purpose of this Standard is to standardize requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards

information that does not change dynamically while the equipment is running)

optical stylus

controlled

E05700 - SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様 Revision:SEMI E57-0600E2 (Reapproved 0305) - Superseded この文書の目的は:(1) 20/0global Physical Interfaces & Carriers Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199620053 300 mm Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF)

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