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SEMI E123-0703 (Reapproved 1109)
Further information regarding UPW systems can be found in SEMI F61
and Sub-Assembly for High Purity Piping Systems and Final Assembly for Semiconductor Manufacturing Equipment
SEMI F79-0914 (technical revision)
The minimum test described in this Standard is to test one MFC in five common mounting positions using Nitrogen gas at 135
E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 StdPbc-0823 SEMI E123-0703 (Reapproved 1109)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment
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