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previously published October 2011
SEMI 3D2-0113 (first published)
1 This Standard establishes practices for measuring selected characteristics of FPD color filters
critical and supercritical applications in the semiconductor industry
This edition was approved for publication by the global Audits and Reviews Subcommittee on April 30
C06600 - SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality Revision:SEMI C66-0317 - Inactive previously published October 2011This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published February 2008. The purpose of this Document is to provide a guide for trimethylaluminum (TMAl) used in the semiconductor industry. The scope of this Document covers a
