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cap and sealing glass materials
This Guide logically follows the series of SEMI Standards developed for UPW
SEMI MF1239-0305 (Reapproved 0222)
where applicable
It defines the properties of SOI wafers that are meant for use in LSI CMOS applications
P02600 - SEMI P26 - Parameter Checklist for Photoresist Sensitivity Measurement Revision:SEMI P26-0703 - Inactive cap and sealing glass materialsThis checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
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