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diameter/thickness)
orgで入手可能となる。初版は1986年発行，前版は2008年3月に発行された。
The form is designed to be used in conjunction with other SEMI specifications where details of the dimensional
9 — Mechanical Specification for Cassette Used to Transport and Store 300mm Wafers
and specifies related things for the substrates
G09400 - SEMI G94 - 300mmウェーハ用コインスタック型テープフレーム出荷容器の仕様 Revision:SEMI G94-0113 - Superseded diameter/thickness)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Assembly & Packaging Global Technical Committee20121220global Audits and Reviews Subcommittee20131www. semiviews. org www. semi. org 300mm 5. 1. 1 (SEMI G74) (SEMI G87) 13 Referenced SEMI Standards SEMI G59 Test Method for Measurement
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