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SEMI E134-0709 (technical revision)
The purpose of this Document is to provide a series of specifications for different grades of nitrogen (N2) that are used in the semiconductor industry
This Test Method is reproducible and provides a metric (i
SEMI G42 — Specification for Thermal Test Board Standardization for Measuring Junction-to-Ambient Thermal Resistance of Semiconductor Packages
based on the electrochemical critical pitting temperature (CPT)
E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 - Superseded SEMI E134-0709 (technical revision)The purpose of this Document is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment and facilities. It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge, voltage, and electric field. This Guide is complementary to SEMI E78 and
