E10900 - SEMI E109 - Specification for Reticle and Pod Management (RPMS) StdPbc-0118 previously published October 2011

previously published October 2011

and qualification methods for liquid chemical blending equipment

1-1020 - Specification for TCP/IP Interface for Production Equipment Smart Connection Interface (PESCI)

and control system suppliers

and other components to determine the effectiveness of surface finishing and cleaning processes

E10900 - SEMI E109 - Specification for Reticle and Pod Management (RPMS) StdPbc-0118 previously published October 2011This Specification provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles