E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports StdTpc-Gases - Process SEMI G64-96 (Reapproved 0811)

SEMI G64-96 (Reapproved 0811)

Compactness

This defines the width and length of a leadframe strip

Equipment suppliers need to know what limitations there are for equipment configurations and for moving equipment into facilities in order to design their products

• Storage of the master copies of the recipes are centralized to Recipe Server in RMS (Recipe Server Centric concept)

E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports StdTpc-Gases - Process SEMI G64-96 (Reapproved 0811)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This guideline defines the zones and volumes in which load port status indicators and load port operation switches should be placed. The purpose of this guideline is to give a similarity in the placement of them on a 300 mm