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本仕様は，global Silicon Wafer Committeeで技術的に承認されている。現版は，2010年8月27日 ，global Audits & Reviews Subcommitteeにて発行が承認された。2010年10月にwww
SEMI D20-93 (first published)
SEMI E111-1104 (technical revision)
The scope of this Document covers a grade of trimethylborate used in the semiconductor industry
exhaust scrubbers
M05400 - SEMI M54 - 半絶縁性（SI）GaAs材料のパラメータのガイド Revision:SEMI M54-0304 - Superseded 本仕様は，global Silicon Wafer Committeeで技術的に承認されている。現版は，2010年8月27日 ，globalglobal Compound Semiconductor Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2003320043 : nSI GaAs SI GaAs Referenced SEMI Standards SEMI M9 Specifications for Polished Monocrystalline Gallium Arsenide Slices SEMI M10 Standard Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide SEMI M15 Polished Wafer Defect Limits Table for Polished Gallium Arsenide
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