M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 so the die strength data

so the die strength data is critical for the die quality and certification

specifically for identification of flatted and notched silicon wafers

Forming an industry-consensus standard will minimize contamination

本スタンダードは， Physical Interfaces & Carriers Global Technical Committeeで技術的に承認されている。現版は2014年5月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年7月にwww

SEMI D46-0525 (technical revision)

M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 so the die strength data1 Purpose 1. 1 This Specification defines thin layer silicon on insulator (SOI) wafer requirements for CMOS large scale integrated circuit (LSI) devices. In the case of 200 and 300 mm wafers this Specification is targeted for nodes from 130 to 14 nm. In the case of 150 mm wafers, older LSI generations are included as well. By defining parameters, inspection procedures and acceptance criteria, both suppliers and customers may uniformly define product